The Birck Nanotechnology Center is one of ten bulk centers in Purdue’s $375M, 40-acre Discovery Park. Discovery Park provides an bookish ambiance and accessories for multidisciplinary approaches to interdisciplinary challenges and opportunities spanning the domains of energy, the environment, healthcare, bread-and-butter development, advice admission and citizenry security. Discovery is carefully accompanying with commitment in Discovery Park. Whether it be commercialization, association outreach, attainable policy, K-12 apprenticeship or analytic translation, advisers in Discovery Park accept their architect set on impact, and the assets and adeptness bare to accelerate the action to appulse are chip into the bolt of Discovery Park.
Overview. The Birck Nanotechnology Center (BNC) is an interdisciplinary assay assemblage that provides basement for 160 affiliated adroitness associates and their assay groups from 36 bookish units at Purdue. The new 187,000 sq ft. adeptness includes a 25,000 sq. ft. ISO Class 3-4- 5 (Class 1-10-100) nanofabrication cleanroom – the Scifres Nanofabrication Class – that includes a 2,500 sq. ft. ISO Class 6 (Class 1000) pharmaceutical-grade biomolecular cleanroom. In accession to the cleanroom, the adeptness provides 22,000 sq. ft. of specialized laboratories and offices for 45 citizen adroitness members, 30 post-docs, 30 staff, and about 200 alum students. A adjustable Nanotechnology Incubator lab may be busy by companies through the Purdue Assay Foundation.
All of the accessories in the BNC is shared, and is attainable to able and accomplished users from Purdue and from academic, industrial, and government laboratories alfresco Purdue. Best of the aloft accessories is accessible through recharge centers that abutment maintenance, food and the time of committed agents scientists. Abutment for the facility, equipment, and processes is provided by a agents of 24 scientists, engineers, and abutment cadre with over 425 years of acquaintance in academia and industry. Five of these agents associates are Ph.D.-level scientists.
Cleanroom. The nanofabrication cleanroom consists of 25,000 sq. ft. of bay-chase cleanroom, with 45% of the accolade operating at ISO 3 (Class 1), 40% operating at ISO 4 (Class 10), and the actual 15% operating at ISO 5 (Class 100). The three-level anatomy consists of a abounding subfab, the cleanroom level, and an air-handling akin aloft the cleanroom. A perforated aloft attic ensures unidirectional airflow and bulkhead-mounted accessories separates operational functions from aliment functions. A aggregate of accurate ascendancy of the airflow path, assorted stages of filtration, accurate best of materials, and non-ionic-steam humidification ensure the ascendancy of both chapped and diminutive contamination. A actual apprenticed cossack slab provides NIST “A” beating rating, approximating quiet, slab-on-grade construction.
Lithography. Lithographic adequacy spans the nano and micro scale, with the adequacy of amalgam nanoscale structures aural micro-scale devices. A Vistec VectorBeam VB-6 UHR- UWF electron-beam lithography arrangement provides the adequacy of 6 nanometer curve in abide beyond a 1.3 mm field. A Raith e-beam nanolithography arrangement is appointed to access in December 2007, and will board 20 nanometer resolution. An arrest lithography arrangement provides 100 nanometer resolution for less-critical operations.
Optical lithography is acclimated in abounding operations in BNC, and is accurate by a maskmaking operation and single- and double-sided affectation alignment. 10x and 5x Criss-Cross Pattern Generator/Step-and-Repeat maskmaking systems, accompanying with specialized image-reversal systems, board a array of photomasks to abutment assay efforts.
Etching. Wet- and dry-etch capabilities acquiesce the carving at aerial aspect ratios in a array of materials. Two STS DRIE systems, a xenon difluoride etcher, an Oxford PlasmaTech system, and a soon-to-arrive Panasonic chlorine/fluorine arrangement ballast the carving capabilities.
Deposition. Metal degradation is a backbone in the BNC. Six evaporators and three sputterers acquiesce the degradation of added than 20 altered materials. Additionally, plasma-enhanced degradation systems and a -to-be operational LPCVD arrangement board added capabilities. Of appropriate absorption are two atomic-layer-deposition (ALD) systems advised abnormally for high- candor high-k dielectric films.
Furnaces. A three-tube coffer of action furnaces board apple-pie (i.e., gate) oxidation, LTO, and LPCVD capabilities. This is supplemented by a abstracted two-tube pyrogenic blaze arrangement and several abate high-temperature tubes and lower-temperature annealing tubes. Low temperature annealing and activation can be performed on two rapid-thermal-processing systems.
Ultra-Pure Water. The ultra-pure baptize (UPW) arrangement at BNC food all laboratories and the cleanroom with abundantly authentic water. Termed nano-grade water, this baptize is beneath the altitude banned of 15 genitalia per abundance of boron, the ion best about apprenticed to the alloyed beds and accordingly the best acceptable ionic birthmark in the water. This baptize additionally contains beneath than 225 genitalia per abundance of absolute oxidizable carbon (TOC) and beneath than 1 allotment per billion of attenuated oxygen.
Biocleanroom. Chip into the Scifres Nanofabrication Class is a pharmaceutical-grade cleanroom to acquiesce antiseptic processing. This cleanroom is entered through a abstracted gowning allowance and has a absolutely abstracted air-handling system, but has a pass-through to the nanofabrication cleanroom to acquiesce abstracts to be transferred into this adeptness after breaking cleanliness. Advised for sanitization, it trades a perforated attic for coved sheet-vinyl attic and boasts a appropriate biologic bank and axle system. Alfresco the access to the biocleanroom is an amid aerial aisle to Bindley Bioscience Center.
Overview. In accession to the cleanroom, the BNC includes a apartment of specialized laboratories that board outstanding capabilities to researchers. All BNC laboratories are advised for low acoustic noise, beneath than 1 milligauss EMI, and /- 1 bulk C temperature stability. Additionally, the first-floor laboratories accomplish NIST A beating rating. From this base, assertive laboratories accept been adapted to board alike added acrimonious banned to board specialized needs. For example, the TEM class has tighter temperature controls, has specialized airflow patterns, and has appropriate acoustic abstracts on the walls and floors.
Hall Nanometrology Class and Scanning Tunneling Microscopy. For awful acute functions, the Kevin G. Hall Nanometrology Class provides added ascendancy of temperature, vibration, acoustic noise, and EMI. Temperature is controlled to /- 0.01 bulk C, EMI is controlled to beneath than 0.1 milligauss, acoustic babble is aural NC-35 criteria, and beating is controlled to NIST A-1 criteria. An Omicron UHV Scanning Tunneling Microscope amid in the class allows the abstraction and abetment of abstracts on the diminutive scale.
Scanning Laser-Doppler Vibrometry. A specialized class that meets NIST A-1 beating belief houses the Scanning Laser-Doppler Vibrometer. The Polytec MSA-400 Micro Arrangement Analyzer uses a array of methods to characterize motion in micro- and nanostructures.
Scanning Delving Microscopy. Seven diminutive force microscopes board topographical abstracts on surfaces as able-bodied as acceptance the abetment of abstracts at the nano scale.
Electron Microscopy. Four electron microscopes board the adeptness to angel nanoscale accessories and materials, as able-bodied as to abstraction acknowledgment mechanisms at the diminutive scale. An FEI Titan 80-300 keV Acreage Emission Environmental Transmission Electron Microscope – Scanning Transmission Electron Microscope provides resolutions to 0.7 by 1.0 Angstrom units. The arrangement contains an in-situ acknowledgment chamber, and is able with a high-performance camera and abstracts server.
Supplementing the capabilities of the Titan are an FEI Field-Emission Scanning Electron Microscope, an FEI “Novalab” Focused Ion Axle – Scanning Electron Microscope system, and a dual-function JEOL Scanning Electron Microscope with electron-beam direct-write capability.
Surface Analysis. The apparent assay class contains a Kratos Imaging x-Ray Photoemission Spectrometer (XPS) with an in-situ acknowledgment corpuscle and an Omicron apparent assay array tool. The XPS has a 15 micrometer atom size, and provides atomic-level assay of materials. The array apparatus contains assorted accessories to characterize the surfaces of materials, including a high-resolution electron-energy-loss spectrometer (EELS), a scanning electron microscope (SEM), a scanning auger spectrometer, a hemispherical electron spectrometer for XPS, AES, UPS, ISS, and a focused ion axle (FIB) arrangement – all affiliated beneath ultra-high vacuum.
x-Ray Diffraction. The x-ray diffraction class contains a high-resolution PANalytical “x”Pert Pro x-ray diffraction system.
Epitaxy. Several BNC laboratories accommodate accessories for specialized, awful absolute epitaxial growth. A Varian Gen II Diminutive Axle Epitaxy arrangement for III-V epitaxy, an Epigress VP-508 hot-wall CVD reactor for SiC, an Aixtron AIX 200/4 metal-organic actinic breath degradation (MOCVD) arrangement for GaN, and a halide vapor-phase epitaxy reactor for GaN acquiesce the advance of a array of homoepitaxial and heteroepitaxial abstracts .
Deposition. An ASTeX plasma-enhanced actinic breath degradation arrangement allows blur advance of specialized materials.
Biosafety Akin 2 Laboratories. The BNC has two biosafety akin 2 laboratories, one absolute two tissue-culture apartment that accomplish at biosafety akin 2 . These specialized laboratories acquiesce for the safe administration of biological abstracts acclimated in the development of accessories and commitment methods.
Biosafety Akin 1 and Nanochemistry Laboratories. The BNC additionally provides four laboratories for beneath chancy nano-bio and nanochemistry research. These laboratories, classified at BSL-1 or below, are acclimated for both automated and wet-chemical assay activities.
Electrical Assuming Laboratories. A cogent bulk of BNC class amplitude is allocated to electrical characterization. From a soon-to-be-operational 8 Tesla, liquid-helium- cooled Hall Effect altitude arrangement to assorted cloistral delving stations with hot and algid testing capabilities, these laboratories board the accessories and accessories all-important to appraise new materials, structures, and devices.
Laser Laboratories. Specialized laboratories for optical abstracts development, optically added deposition, and optical assuming methods accept been implemented in the BNC. Using lasers of assorted ability levels – up to Class 4 – BNC advisers are able to advance materials, processes, and accessories for activity about-face and added applications. These laboratories additionally abutment assay strengths in nanoelectronics and nanophotonics.
Nanoincubator Laboratory. The BNC provides adjustable class amplitude that can be busy by companies through the Purdue Assay Foundation. This amplitude is advised to board a secure, specialized class for companies adulatory to use the basement of the BNC while advancement clandestine class amplitude for specialized or proprietary work.
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